If you’re new to the nanotechnology world, you might want to read an article on materials measurements at the nanoscale.  I happen to know the author very well.  The article walks through all the various instruments for making measurements on nanotechnology tools.  Some of them will surprise you as a number of people are using electronic instruments to make surogate measurements.  Check it out - page 10.

http://www.home.agilent.com/upload/cmc_upload/All/amj3_09_11_07.pdf

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