MEMS / NEMS measurement solutions
by Grant Drenkow
The Agilent 4294A Impedance Analyzer is a very popular product for MEMS (micro electromechanical systems) measurements. Although technically not considered nanotechnology, the measurement principles apply to nanoscale devices. Agilent has an application note for using this product with a probing station to measure MEMS. I think you will find this application very appropriate for those of you interested in making impedance measurements at the nanoscale.
Check out Application Note 1369-3 “Accurate Impedance Measurement with a Cascade Microtech Probe System”. If you want more information on MEMS and NEMS measurements from Agilent - go to this Agilent web page - www.agilent.com/find/mems
